PREFACE§§M3: THE THIRD DIMENSION OF SILICON§§TRENDS IN MEMS COMMERCIALIZATION§§CAPACITIVE INTERFACES FOR MEMS§§PACKAGING OF ADVANCED MICRO- AND NANOSYSTEMS§§HIGH-FREQUENCY INTEGRATED MICROELECTROMECHANICAL RESONATORS§§MEMS IN MASS STORAGE SYSTEMS§§SCANNING MICRO- AND NANOPROBES FOR ELECTROCHEMICAL IMAGING§§NANOFLUIDIC MODELING AND SIMULATION§§NANOFLUIDICS ? STRUCTURES AND DEVICES§§CARBON NANOTUBES AND SENSORS: A REVIEW§§CMOS-BASED DNA SENSOR ARRAYS M3: the Third Dimension of Silicon§Trends in MEMS Commercialization§Capacitive Interfaces for MEMS§Packaging of Advanced Micro- and Nanosystems§High-frequency Integrated Microelectromechanical Resonators and Filters§MEMS in Mass Storage Systems§Scanning Micro- and Nanoprobes for Electrochemical Imaging§Nanofluidic Modeling and Simulation§Nanofluidics -§Structures and Devices§Carbon Nanotubes and Sensors§CMOS-based DNA Sensor Arrays leírás elrejtése